A new concept of microphones based on the M&NEMS technology revolutionizes the design of this type of device. The M&NEMS concept, which offers a completely innovative architecture, allows treating separately the detection and electrical transduction. A complete study and characterization of these components will assess the achievable performances. In particular the efforts will be focused on noise reduction.

Initial electrical testing at wafer level or chip level will characterize the performances of these new components and determine their failure modes. Then, acoustic testing performed on a specific acoustic test bench, will characterize acoustical microphone’s performances.

Then further study of the failure modes will be achieved. Associated with morphological observations, further characterizations will be conducted to determine the performance and relate them to changes in design and manufacturing process.

Recommendations to improve the functionality of the M&NEMS microphones will guide the designers.

This thesis will take place in the laboratory of Characterization and Reliability (LCFC) in close collaboration with the laboratory of MEMS sensors (LCMC) at CEA Leti.

This position is open until it is filled.

Department: Département Composants Silicium (LETI)
Laboratory: Laboratoire de Caractérisation et Fiabilité des Composants
Start Date: 01-10-2015
ECA Code: SL-DRT-15-0125
Contact: helene.duchemin<στο>cea.fr